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Semiconductor devices: physics and technology

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Semiconductor.Devices_Physics.Technology_Sze.2ndEd_Wiley_2002.pdf (28.48Mb)
Date
2002
Author
Sze, S M
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Abstract
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
URI
http://hdl.handle.net/123456789/602
Collections
  • Science and Engineering [224]

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