Semiconductor devices: physics and technology

dc.contributor.author	Sze, S M
dc.date.accessioned	2015-09-07T19:57:03Z
dc.date.available	2015-09-07T19:57:03Z
dc.date.issued	2002
dc.identifier.citation	New York : John Wiley, 2002	en_US
dc.identifier.isbn	0-471-33372-7
dc.identifier.uri	http://hdl.handle.net/123456789/602
dc.description.abstract	This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.	en_US
dc.language.iso	en	en_US
dc.publisher	John Wiley	en_US
dc.subject	Semiconductors	en_US
dc.title	Semiconductor devices: physics and technology	en_US
dc.type	Book	en_US